Highly crystalline BaTiO3 particles were prepared by sol-gel process. Ultrasound and microwave techniques were used to facilitate the synthesis of BaTiO3. BaTiO3 samples were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), particle size analyser, and high temperature differential scanning calorimetry/thermogravimetric analysis (DSC/TGA). The results indicate that both barium and titanium sources and preparation techniques affected BaTiO3 purity and crystallite size. The smallest particle and crystallite sizes were obtained by using BaCl2 and (C4H9O)(4)Ti and the crystallite size of BaTiO3 was 8 +/- 1 nm via MW technique.