Chemical vapour deposition of pyrolytic carbon from impinging jets


EROĞLU Ş. , Gallois B.

CERAMICS INTERNATIONAL, cilt.22, ss.483-487, 1996 (SCI İndekslerine Giren Dergi)

  • Cilt numarası: 22 Konu: 6
  • Basım Tarihi: 1996
  • Doi Numarası: 10.1016/0272-8842(95)00121-2
  • Dergi Adı: CERAMICS INTERNATIONAL
  • Sayfa Sayısı: ss.483-487

Özet

Pyrolytic carbon coatings were deposited on a graphite substrate by chemical vapour deposition technique from impinging jets of ethylene gas. The growth and structure of the coatings were investigated as a function of gas flow velocity. The deposition rate of the coatings increased linearly with the square root of gas velocity or flow rate of ethylene. This behaviour was explained by a mass-transport theory. The coatings exhibited cone-like morphology at low gas velocities and cauliflower-like morphology at high gas velocities. Textural analyses revealed that all the coatings were preferentially oriented in the < 001 > direction perpendicular to the substrate. (C) 1996 Elsevier Science Limited and Techna S.r.l.